Qhov tseem ceeb ntawm high-purity gas piping rau semiconductors

As semiconductorthiab microelectronic technologies txhim kho mus rau kev ua tau zoo dua thiab kev sib koom ua ke ntau dua, cov kev xav tau siab dua tau muab tso rau ntawm purity ntawm hluav taws xob tshwj xeeb gases. High-purity gas piping technology yog ib feem tseem ceeb ntawm high-purity gas mov system. Nws yog cov thev naus laus zis tseem ceeb rau kev xa cov roj purity siab uas ua tau raws li qhov yuav tsum tau ua rau cov ntsiab lus siv roj thaum tseem tswj tau qhov tsim nyog.

High-purity piping thev naus laus zis suav nrog kev tsim kom raug ntawm lub kaw lus, xaiv cov yeeb nkab fittings thiab cov khoom siv pabcuam, kev tsim kho thiab kev teeb tsa thiab kev sim.

01 Lub tswv yim dav dav ntawm cov kav dej xa hluav taws xob

Tag nrho cov high-purity thiab high-purity gases yuav tsum tau thauj mus rau lub davhlau ya nyob twg gas point los ntawm pipelines. Txhawm rau ua kom tau raws li cov txheej txheem kev ua haujlwm zoo rau cov roj, thaum cov roj xa tawm ntsuas yog qhov tseeb, nws yog qhov tsim nyog yuav tsum tau them sai sai rau cov khoom xaiv thiab kev tsim kho zoo ntawm cov kav dej. Ntxiv nrog rau qhov tseeb ntawm cov khoom siv roj av lossis cov khoom siv purification, nws raug cuam tshuam los ntawm ntau yam ntawm cov kav dej. Yog li ntawd, kev xaiv cov kav dej yuav tsum tau ua raws li cov cai ntawm kev lag luam purification thiab kos cov khoom ntawm cov kav dej hauv cov duab kos.

02 Qhov tseem ceeb ntawm high-purity pipelines hauv kev thauj mus los roj

Qhov tseem ceeb ntawm high-purity pipelines nyob rau hauv high-purity gas tsheb thauj mus los Thaum lub sij hawm lub stainless hlau smelting txheej txheem, txhua tuj yuav nqus tau txog 200g roj. Tom qab cov hlau tsis huv tau ua tiav, tsis tsuas yog muaj ntau yam kuab paug daig ntawm nws qhov chaw, tab sis kuj muaj qee qhov roj tau nqus hauv nws cov hlau lattice. Thaum muaj cua nkag mus rau hauv lub raj xa dej, ib feem ntawm cov pa uas tau nqus los ntawm cov hlau yuav rov nkag mus rau hauv cov pa thiab ua rau cov pa ntshiab huv.

Thaum cov cua ntws hauv cov yeeb nkab tsis tu ncua, cov yeeb nkab ua rau siab adsorption ntawm cov roj uas dhau los. Thaum cov huab cua tsis dhau mus, cov roj adsorbed los ntawm cov yeeb nkab tsim cov kev ntsuas kev txo qis, thiab cov roj txheeb xyuas kuj nkag mus rau cov roj ntshiab hauv cov yeeb nkab raws li impurity.

Nyob rau tib lub sij hawm, lub adsorption thiab tsom xam voj voog yuav ua rau cov hlau nyob rau hauv lub puab nto ntawm cov yeeb nkab los tsim ib tug npaum li cas ntawm hmoov. Cov hmoov av hlau no kuj ua rau cov pa ntshiab huv hauv cov yeeb nkab. Cov yam ntxwv ntawm cov yeeb nkab no tseem ceeb heev. Txhawm rau kom ntseeg tau tias lub purity ntawm cov pa thauj mus los, tsis tsuas yog nws yuav tsum tau hais tias lub puab nto ntawm cov yeeb nkab muaj ib tug heev smoothness, tab sis kuj hais tias nws yuav tsum muaj siab hnav tsis kam.

Thaum cov roj muaj cov khoom muaj zog corrosive, cov kav dej tsis muaj corrosion-resistant stainless hlau yuav tsum tau siv rau cov kav dej. Txwv tsis pub, cov pob txha pob txha yuav tshwm nyob rau sab hauv ntawm cov yeeb nkab vim yog corrosion. Hauv qhov xwm txheej hnyav, cov hlau loj yuav tev tawm lossis txawm tias perforate, yog li kis tau cov pa ntshiab uas raug thauj mus los.

03 Cov khoom siv yeeb nkab

Kev xaiv cov khoom siv ntawm cov yeeb nkab yuav tsum tau xaiv raws li qhov xav tau ntawm kev siv. Qhov zoo ntawm cov yeeb nkab feem ntau ntsuas raws li qhov roughness ntawm sab hauv ntawm cov yeeb nkab. Qhov qis dua qhov roughness, qhov tsawg dua nws yuav nqa cov khoom. Feem ntau muab faib ua peb hom:

Ib tug yogEP qib 316L yeeb nkab, uas tau raug electrolytically polished (Electro-Polish). Nws yog corrosion-resistant thiab muaj tsawg nto roughness. Rmax (qhov siab tshaj plaws rau lub hav qhov siab) yog li 0.3μm lossis tsawg dua. Nws muaj qhov flatness siab tshaj plaws thiab tsis yooj yim rau tsim micro-eddy tam sim no. Tshem tawm cov khoom tsis huv. Cov tshuaj tiv thaiv roj siv hauv cov txheej txheem yuav tsum tau muab tso rau ntawm theem no.

Ib tug yog aBA qib 316Lyeeb nkab, uas tau kho los ntawm Bright Anneal thiab feem ntau yog siv rau cov pa roj carbon monoxide, tab sis tsis koom nrog cov txheej txheem tshuaj tiv thaiv, xws li GN2 thiab CDA. Ib qho yog AP yeeb nkab (Annealing & Picking), uas tsis yog tshwj xeeb kho thiab feem ntau yog siv rau ob chav txheej ntawm cov kav dej sab nrauv uas tsis siv los ua cov khoom siv roj.

04 Pipeline kev tsim kho

Kev ua cov yeeb nkab qhov ncauj yog ib qho ntawm cov ntsiab lus tseem ceeb ntawm kev tsim kho tshuab. Lub raj xa dej txiav thiab prefabrication yog nqa tawm nyob rau hauv ib puag ncig huv si, thiab tib lub sijhawm, nws tau ua kom ntseeg tau tias tsis muaj cov cim tsis zoo lossis kev puas tsuaj rau saum npoo ntawm cov kav dej ua ntej txiav. Kev npaj rau kev tso dej nitrogen hauv cov kav dej yuav tsum tau ua ua ntej qhib lub kav dej. Nyob rau hauv txoj cai, vuam yog siv los txuas cov high-purity thiab high-cleanliness gas kis thiab tis pipelines nrog loj txaus, tab sis ncaj welding tsis pub. Cov pob qij txha yuav tsum tau siv, thiab cov khoom siv yeeb nkab siv yuav tsum tsis muaj kev hloov pauv hauv cov qauv thaum vuam. Yog hais tias cov khoom uas muaj cov ntsiab lus carbon siab dhau yog welded, huab cua permeability ntawm qhov vuam yuav ua rau cov roj hauv thiab sab nraud ntawm cov yeeb nkab nkag mus rau ib leeg, ua rau cov purity, dryness thiab huv si ntawm conveying gas, uas yuav ua rau muaj teeb meem loj. thiab cuam tshuam rau kev tsim khoom zoo.

Nyob rau hauv cov ntsiab lus, rau high-purity gas thiab tshwj xeeb kis tau tus mob pipelines, yuav tsum tau siv tshwj xeeb kho high-purity stainless hlau yeeb nkab, uas ua rau cov high-purity pipeline system (xws li pipelines, yeeb nkab fittings, li qub, VMB, VMP) nyob ib Lub luag haujlwm tseem ceeb hauv high-purity gas faib.