1. Bulk Gas System Txhais:
Cia thiab tswj siab ntawm inert gases Gas hom: Hom inert gases (nitrogen, argon, compressed cua, thiab lwm yam)
Pipeline loj: Los ntawm 1/4 (saib cov kav dej) mus rau 12-nti lub kav dej loj
Cov khoom tseem ceeb ntawm lub cev yog: diaphragm valve / bellows valve / pob valve, high-purity connector (VCR, vuam daim ntawv), ferrule connector, siab tswj valve, siab ntsuas, thiab lwm yam.
Tam sim no, cov txheej txheem tshiab tseem suav nrog cov roj tshwj xeeb ntau, uas siv cov roj av ruaj khov lossis cov tsheb thauj mus los rau kev khaws cia thiab kev thauj mus los.
2. Purification System Txhais:
Tshem tawm cov impurities los ntawm cov pa roj ntau rau cov kav dej uas muaj purity siab
3. Gas Txee txhais:
Muab kev tswj siab thiab kev soj ntsuam xyuas rau cov pa roj tshwj xeeb (tshuaj lom, flammable, reactive, corrosive gases), thiab muaj peev xwm los hloov cov roj thooj av.
Qhov chaw: Nyob ntawm Sub-fab pem teb los yog hauv qab hauv pem teb rau kev cia cov roj tshwj xeeb Source: NF3, SF6, WF6, thiab lwm yam.
Pipeline loj: Internal gas pipeline, feem ntau 1/4 nti rau txheej txheem pipeline, 1/4-3/8 nti mas rau siab purity nitrogen purge pipeline.
Cov khoom tseem ceeb: High purity diaphragm li qub, kos li qub, ntsuas ntsuas siab, ntsuas ntsuas siab, siab purity connectors (VCR, vuam daim ntawv) Cov khoom siv roj no yeej muaj peev xwm hloov pauv tsis siv neeg lub tog raj kheej kom ntseeg tau cov roj txuas ntxiv thiab kev nyab xeeb hloov ntawm lub tog raj kheej.
4. Distribution txhais:
Txuas cov pa roj mus rau cov roj sau coil
Kab loj: Nyob rau hauv lub tshuab nti, qhov loj ntawm cov pa xa hluav taws xob feem ntau yog li ntawm 1/2 nti mus rau 2 ntiv tes.
Daim ntawv sib txuas: Cov kav dej tshwj xeeb yog feem ntau txuas nrog vuam, tsis muaj kev sib txuas ntawm cov tshuab lossis lwm yam txav, feem ntau vim tias qhov sib txuas vuam muaj kev sib khi ruaj khov.
Nyob rau hauv ib lub tshuab chip, muaj ntau pua mais ntawm tubing txuas rau xa cov pa roj, uas yog qhov pib ntawm 20 feet ntev thiab welded ua ke. Qee qhov khoov tubing thiab tubular vuam kev sib txuas kuj muaj ntau heev.
5. Multi-function valve box (Valve Manifold Box, VMB) Txhais:
Nws yog txhawm rau faib cov pa roj tshwj xeeb los ntawm cov khoom siv roj rau cov khoom siv sib txawv.
Internal pipeline loj: 1/4 nti txheej txheem pipeline, thiab 1/4 - 3/8 nti purge pipeline. Lub kaw lus yuav siv lub computer tswj kom xav tau cov khoom siv hluav taws xob los yog cov nqi qis dua nrog cov phau ntawv li qub.
Cov khoom lag luam: siab purity diaphragm li qub / bellows li qub, kos li qub, siab purity pob qij txha (VCR, micro-welding daim ntawv), siab regulating li qub, siab gauges thiab siab gauges, thiab lwm yam. - VMP (multi-function valve disc) feem ntau yog siv, uas muaj qhov qhib roj disc nto thiab tsis tas yuav tsum tau kaw qhov chaw tsim thiab ntxiv nitrogen tshem tawm.
6. Secondary valve phaj / lub thawv (Tool Hookup Panel) Txhais:
Txuas cov roj uas yuav tsum tau ua los ntawm cov khoom siv semiconductor los ntawm cov khoom siv roj mus rau cov khoom siv kawg thiab muab cov kev cai sib xws. Lub vaj huam sib luag no yog lub tshuab hluav taws xob tswj hluav taws xob uas nyob ze rau cov khoom siv kawg tshaj li VMB (multi-function valve box).
Gas pipeline loj: 1/4 - 3/8 nti
Cov kav dej ua kua loj: 1/2 - 1 nti
Cov kav dej loj: 1/2 - 1 nti
Cov khoom tseem ceeb: diaphragm valve / bellows valve, ib-txoj kev valve, siab tswj valve, siab ntsuas, ntsuas siab, siab purity sib koom (VCR, micro-welding), ferrule sib koom, pob valve, hose, thiab lwm yam.
Post lub sij hawm: Nov-22-2024