909 Txoj Haujlwm Loj Loj Tshaj Lij Tshaj Lij Tshaj Lij Tshaj Lij Tshaj Lij Tshaj Lij yog ib txoj haujlwm tseem ceeb ntawm kuv lub teb chaws txoj kev lag luam hluav taws xob thaum lub Cuaj Hlis Tsib Hlis los tsim cov chips nrog ib kab dav ntawm 0.18 microns thiab txoj kab uas hla ntawm 200 mm.
Kev tsim tshuab ntawm kev sib xyaw ua ke loj heev tsis yog tsuas yog siv cov thev naus laus zis siab xws li micro-machining, tab sis kuj muab cov kev xav tau siab ntawm cov roj purity.
Cov khoom siv roj ntau rau Project 909 yog muab los ntawm kev sib koom ua lag luam ntawm Praxair Utility Gas Co., Ltd. ntawm Tebchaws Meskas thiab cov koom haum cuam tshuam hauv Shanghai los koom ua ke tsim cov chaw tsim khoom roj.Cov roj ntau lawm yog nyob ib sab ntawm 909 qhov project Hoobkas. lub tsev, npog thaj tsam ntawm kwv yees li 15,000 square meters. Lub purity thiab tso zis yuav tsum tau ntawm ntau yam gases
High-purity nitrogen (PN2), nitrogen (N2), thiab high-purity oxygen (PO2) yog tsim los ntawm huab cua sib cais. High-purity hydrogen (PH2) yog tsim los ntawm electrolysis. Argon (Ar) thiab helium (Nws) yog yuav outsourced. Lub quasi-gas yog purified thiab lim rau siv nyob rau hauv Project 909. Tshwj xeeb gas yog muab nyob rau hauv lub raj mis, thiab cov roj lub raj mis txee nyob rau hauv lub koom haum pab rhiav ntawm lub integrated Circuit Court ntau lawm cog.
Lwm cov pa roj kuj suav nrog cov cua qhuav compressed cua CDA system, nrog rau kev siv ntim ntawm 4185m3 / h, lub siab dew point ntawm -70 ° C, thiab qhov me me ntawm tsis pub tshaj 0.01um hauv cov roj ntawm qhov chaw siv. Ua pa compressed cua (BA) system, kev siv ntim 90m3 / h, siab dew point 2 ℃, particle loj nyob rau hauv cov pa ntawm qhov chaw ntawm kev siv tsis ntau tshaj 0.3um, txheej txheem nqus tsev (PV) system, siv ntim 582m3 / h, Lub tshuab nqus tsev kawm ntawv ntawm qhov chaw siv -79993Pa . Kev tu lub tshuab nqus tsev (HV), kev siv ntim 1440m3 / h, nqus tsev kawm ntawv ntawm qhov chaw siv -59995 Pa. Cov chav cua compressor thiab lub tshuab nqus tsev twj tso kua mis yog ob qho tib si nyob rau hauv 909 qhov project Hoobkas cheeb tsam.
Xaiv cov khoom siv yeeb nkab thiab cov khoom siv
Cov roj siv hauv VLSI ntau lawm muaj cov kev cai huv huv heev.High-purity gas pipelinesfeem ntau yog siv nyob rau hauv qhov chaw tsim khoom huv si, thiab lawv cov kev tswj kev huv yuav tsum ua raws li los yog siab dua qhov kev huv huv ntawm qhov chaw siv! Tsis tas li ntawd, high-purity gas pipelines feem ntau yog siv rau hauv qhov chaw huv si. Pure hydrogen (PH2), high-purity oxygen (PO2) thiab qee cov pa roj tshwj xeeb yog cov nplaim hluav taws kub hnyiab, tawg, combustion-txhawb lossis cov pa phem. Yog tias cov kav dej xa hluav taws xob tsis raug tsim los yog cov khoom siv raug xaiv tsis raug, tsis yog tsuas yog cov purity ntawm cov roj siv ntawm cov roj taw tes txo qis, tab sis nws kuj yuav ua tsis tiav. Nws ua tau raws li cov txheej txheem, tab sis nws tsis muaj kev nyab xeeb rau kev siv thiab yuav ua rau muaj kuab paug rau lub Hoobkas huv si, cuam tshuam rau kev nyab xeeb thiab kev nyab xeeb ntawm lub Hoobkas huv.
Qhov kev lees paub ntawm qhov zoo ntawm cov roj purity siab ntawm qhov siv tsis tau tsuas yog nyob ntawm qhov tseeb ntawm cov khoom siv roj, cov khoom siv purification thiab cov ntxaij lim dej, tab sis kuj cuam tshuam rau qhov loj los ntawm ntau yam hauv cov kav dej. Yog tias peb tso siab rau cov khoom siv roj, cov khoom siv lim dej huv thiab cov lim dej Nws tsuas yog tsis raug rau kev txwv tsis pub muaj kev xav tau ntau dua los them rau cov pa roj piping system tsim lossis xaiv cov khoom siv.
Thaum lub sijhawm tsim cov txheej txheem ntawm 909 qhov project, peb tau ua raws li "Code for Design of Clean Plants" GBJ73-84 (tus qauv tam sim no yog (GB50073-2001)), "Code for Design of Compressed Air Stations" GBJ29-90, "Code Rau Kev Tsim Cov Chaw Nres Oxygen" GB50030-91 , "Code for Design of Hydrogen and Oxygen Stations" GB50177-93, thiab cov kev ntsuas cuam tshuam rau kev xaiv cov khoom siv hauv cov kav dej thiab cov khoom siv. "Code for Design of Clean Plants" qhia txog kev xaiv cov khoom siv kav dej thiab cov li qub raws li hauv qab no:
(1) Yog tias cov roj purity ntau dua los yog sib npaug rau 99.999% thiab cov dej lwg qis dua -76 ° C, 00Cr17Ni12Mo2Ti low-carbon stainless hlau yeeb nkab (316L) nrog electropolished sab hauv phab ntsa lossis OCr18Ni9 stainless hlau yeeb nkab (304) nrog electropolished puab phab ntsa yuav tsum tau siv. Lub valve yuav tsum yog lub diaphragm valve lossis lub valve valve.
(2) Yog tias cov roj purity ntau dua lossis sib npaug li 99.99% thiab cov dej lwg qis dua -60 ° C, OCr18Ni9 stainless hlau raj (304) nrog electropolished sab hauv phab ntsa yuav tsum tau siv. Tsuas yog cov twj tso kua mis uas yuav tsum tau siv rau cov kav xa hluav taws xob, lub pob valve yuav tsum siv rau lwm cov kav dej.
(3) Yog hais tias lub lwg taw tes ntawm qhuav compressed cua yog qis dua -70 ° C, OCr18Ni9 stainless hlau yeeb nkab (304) nrog polished puab phab ntsa yuav tsum tau siv. Yog tias cov dej lwg qis dua -40 ℃, OCr18Ni9 stainless hlau yeeb nkab (304) lossis kub-dip galvanized seamless steel yeeb nkab yuav tsum tau siv. Lub valve yuav tsum yog lub hauv siab valve lossis lub pob valve.
(4) Cov khoom siv valve yuav tsum sib haum nrog cov khoom siv sib txuas.
Raws li qhov yuav tsum tau muaj ntawm cov kev qhia tshwj xeeb thiab cov kev ntsuas cuam tshuam, peb feem ntau xav txog cov hauv qab no thaum xaiv cov khoom siv hauv cov kav dej:
(1) Cov huab cua permeability ntawm cov khoom siv yeeb nkab yuav tsum me me. Cov yeeb nkab ntawm cov khoom sib txawv muaj qhov sib txawv ntawm huab cua permeability. Yog tias cov kav dej uas muaj huab cua permeability ntau dua raug xaiv, cov pa phem tsis tuaj yeem raug tshem tawm. Stainless hlau kav thiab tooj liab kav yog zoo dua los tiv thaiv kev nkag mus thiab corrosion ntawm oxygen nyob rau hauv cov huab cua. Txawm li cas los xij, txij li cov kav hlau tsis muaj zog tsis tshua muaj zog dua cov kav dej tooj liab, cov kav dej tooj liab muaj zog ntau dua rau kev tso dej noo hauv qhov chaw nkag mus rau hauv lawv cov chaw sab hauv. Yog li ntawd, thaum xaiv cov kav dej rau cov kav dej uas muaj purity siab, cov kav hlau stainless yuav tsum yog thawj qhov kev xaiv.
(2) Sab hauv ntawm cov khoom siv yeeb nkab yog adsorbed thiab muaj kev cuam tshuam me me rau kev txheeb xyuas cov roj. Tom qab ua tiav cov yeeb nkab steel hlau, qee cov roj yuav khaws cia rau hauv nws cov hlua hlau. Thaum cov roj purity siab dhau mus, qhov no ntawm cov roj yuav nkag mus rau hauv huab cua thiab ua rau muaj kuab paug. Nyob rau tib lub sijhawm, vim yog adsorption thiab kev tsom xam, cov hlau nyob rau sab hauv ntawm cov yeeb nkab kuj tseem yuav tsim cov hmoov txhuas, ua rau muaj kuab paug rau cov roj purity siab. Rau cov kav dej uas muaj purity siab tshaj 99.999% lossis qib ppb, 00Cr17Ni12Mo2Ti qis carbon stainless hlau yeeb nkab (316L) yuav tsum tau siv.
(3) Kev hnav tsis kam ntawm cov kav hlau stainless yog qhov zoo dua li cov kav dej tooj liab, thiab cov plua plav hlau tsim los ntawm huab cua ntws yaig kuj tsawg dua. Kev cob qhia ntau lawm nrog cov kev xav tau ntau dua rau kev ua kom huv si tuaj yeem siv 00Cr17Ni12Mo2Ti qis carbon stainless hlau kav (316L) lossis OCr18Ni9 stainless hlau kav (304), cov kav dej tooj liab yuav tsum tsis txhob siv.
(4) Rau cov kav dej uas muaj roj purity siab tshaj 99.999% lossis ppb lossis ppt qib, lossis hauv chav huv nrog huab cua huv theem N1-N6 tau teev tseg hauv "Clean Factory Design Code", ultra-ntxuav kav lossisEP ultra-ntxuav kavyuav tsum tau siv. Ntxuav "huv raj nrog ultra-smooth puab sab hauv".
(5) Qee qhov tshwj xeeb ntawm cov kav dej siv roj siv hauv cov txheej txheem tsim khoom yog cov roj corrosive heev. Cov kav dej hauv cov kav dej no yuav tsum siv cov kav dej uas tsis muaj corrosion-resistant stainless hlau ua cov kav dej. Txwv tsis pub, cov kav dej yuav raug puas vim yog corrosion. Yog tias muaj cov pob txha corrosion tshwm sim ntawm qhov chaw, cov kav dej zoo tib yam seamless steel kav lossis galvanized welded steel kav yuav tsum tsis txhob siv.
(6) Raws li txoj cai, txhua qhov kev sib txuas ntawm cov kav dej yuav tsum tau welded. Txij li thaum vuam ntawm galvanized steel kav yuav rhuav tshem cov galvanized txheej, galvanized steel kav tsis siv rau cov kav dej hauv chav huv.
Ua raws li cov ntsiab lus saum toj no los txiav txim siab, cov kav dej xa hluav taws xob thiab cov li qub tau xaiv hauv & 7& qhov project yog raws li hauv qab no:
Lub high-purity nitrogen (PN2) cov kav dej yog tsim los ntawm 00Cr17Ni12Mo2Ti cov pa roj carbon monoxide qis (316L) nrog cov phab ntsa hauv electropolished, thiab cov li qub yog ua los ntawm stainless hlau bellows li qub ntawm tib cov khoom.
Cov kav dej nitrogen (N2) yog ua los ntawm 00Cr17Ni12Mo2Ti cov pa roj carbon tsawg (316L) nrog cov phab ntsa hauv electropolished, thiab cov li qub yog ua los ntawm stainless hlau bellows li qub ntawm cov khoom qub.
Lub high-purity hydrogen (PH2) cov kav dej yog ua los ntawm 00Cr17Ni12Mo2Ti cov pa roj carbon tsawg (316L) nrog cov phab ntsa hauv electropolished, thiab cov li qub yog ua los ntawm stainless hlau bellows li qub ntawm cov khoom siv tib yam.
Lub high-purity oxygen (PO2) cov kav dej yog ua los ntawm 00Cr17Ni12Mo2Ti cov pa roj carbon tsawg (316L) nrog cov phab ntsa hauv electro-polished, thiab cov li qub yog ua los ntawm stainless hlau bellows li qub ntawm cov khoom qub.
Argon (Ar) cov kav dej yog tsim los ntawm 00Cr17Ni12Mo2Ti cov pa roj carbon tsawg (316L) nrog cov phab ntsa hauv electropolished, thiab stainless hlau bellows li qub ntawm tib cov khoom siv.
Lub helium (Nws) cov kav dej yog ua los ntawm 00Cr17Ni12Mo2Ti cov pa roj carbon tsawg (316L) nrog cov phab ntsa hauv electropolished, thiab cov li qub yog ua los ntawm stainless hlau bellows li qub ntawm cov khoom qub.
Lub tshuab ziab khaub ncaws qhuav compressed cua (CDA) cov kav dej yog ua los ntawm OCr18Ni9 stainless hlau kav (304) nrog polished puab phab ntsa, thiab li qub yog ua los ntawm stainless hlau bellows li qub ntawm cov khoom qub.
Lub tshuab ua pa compressed cua (BA) cov kav dej yog ua los ntawm OCr18Ni9 stainless hlau kav (304) nrog polished sab hauv phab ntsa, thiab li qub yog ua los ntawm stainless hlau pob li qub ntawm tib cov khoom.
Cov txheej txheem nqus tsev (PV) cov kav dej yog ua los ntawm UPVC kav, thiab cov li qub yog ua los ntawm lub tshuab nqus tsev npauj npaim li qub ua los ntawm cov khoom qub.
Lub tshuab nqus tsev vacuum (HV) cov kav dej yog ua los ntawm cov kav dej UPVC, thiab cov li qub yog ua los ntawm lub tshuab nqus tsev vacuum li qub ua los ntawm cov khoom qub.
Cov kav dej ntawm cov pa roj tshwj xeeb yog txhua yam ua los ntawm 00Cr17Ni12Mo2Ti cov pa roj carbon tsawg (316L) nrog cov phab ntsa hauv electropolished, thiab cov li qub yog ua los ntawm stainless hlau bellows li qub ntawm cov khoom siv tib yam.
3 Kev tsim kho thiab kev teeb tsa cov kav dej
3.1 Tshooj 8.3 ntawm "Clean Factory Building Design Code" qhia cov kev cai hauv qab no rau kev sib txuas cov kav dej:
(1) Cov yeeb nkab sib txuas yuav tsum tau welded, tab sis kub-dip galvanized steel kav yuav tsum tau threaded.Cov khoom sib khi ntawm threaded kev sib txuas yuav tsum ua raws li cov cai ntawm Tshooj 8.3.3 ntawm cov lus qhia no.
(2) Stainless hlau kav yuav tsum tau txuas nrog argon arc vuam thiab taub qab vuam los yog lub qhov (socket welding), tab sis cov kav dej huv huv yuav tsum tau txuas nrog lub taub qab vuam yam tsis muaj cov cim ntawm sab hauv phab ntsa.
(3) Kev sib txuas ntawm cov kav dej thiab cov khoom siv yuav tsum ua raws li cov kev cai sib txuas ntawm cov khoom siv.Thaum siv cov hose txuas, cov hlau hoses yuav tsum tau siv.
(4) Kev sib txuas ntawm cov kav dej thiab cov li qub yuav tsum ua raws li cov cai hauv qab no
① Cov khoom siv sib khi txuas nrog cov kav dej purity siab thiab cov li qub yuav tsum siv cov khoom siv hlau los yog ob lub ferrules raws li cov txheej txheem tsim khoom thiab cov yam ntxwv roj.
② Cov khoom sib khi ntawm cov xov los yog flange txuas yuav tsum yog polytetrafluoroethylene.
3.2 Raws li qhov yuav tsum tau muaj ntawm cov kev qhia tshwj xeeb thiab cov kev ntsuas cuam tshuam, kev sib txuas ntawm cov kav dej siab huv yuav tsum tau welded ntau li ntau tau. Lub taub qab vuam ncaj nraim yuav tsum zam thaum vuam. Yuav tsum siv lub tes tsho los yog cov pob qij txha tiav. Lub tes tsho cov yeeb nkab yuav tsum tau ua los ntawm cov khoom siv tib yam thiab sab hauv qhov smoothness raws li cov kav dej. theem, thaum vuam, txhawm rau tiv thaiv oxidation ntawm vuam ib feem, cov roj ntshiab tiv thaiv yuav tsum tau nkag mus rau hauv cov yeeb nkab vuam. Rau cov kav hlau stainless, argon arc vuam yuav tsum tau siv, thiab cov roj argon ntawm tib purity yuav tsum tau nkag mus rau hauv cov yeeb nkab. Threaded kev twb kev txuas los yog threaded kev twb kev txuas yuav tsum tau siv. Thaum txuas flanges, ferrules yuav tsum tau siv rau kev sib txuas threaded. Tsuas yog cov kav dej oxygen thiab cov kav dej hydrogen, uas yuav tsum siv cov khoom siv hlau, lwm cov kav dej yuav tsum siv cov khoom siv polytetrafluoroethylene gaskets. Siv ib qho me me ntawm silicone roj hmab rau cov gaskets kuj yuav ua tau zoo. Txhim khu cov nyhuv sealing. Cov kev ntsuas zoo sib xws yuav tsum tau ua thaum muaj kev sib txuas flange.
Ua ntej kev teeb tsa ua haujlwm pib, cov ncauj lus kom ntxaws pom ntawm cov kav dej,fittings, li qub, thiab lwm yam yuav tsum tau nqa tawm. Sab hauv phab ntsa ntawm cov kav dej zoo tib yam stainless hlau yuav tsum tau khaws cia ua ntej kev teeb tsa. Cov kav dej, fittings, li qub, thiab lwm yam ntawm cov pa oxygen pipelines yuav tsum nruj me ntsis txwv tsis pub cov roj, thiab yuav tsum nruj me ntsis degreased raws li qhov yuav tsum tau ua ua ntej installation.
Ua ntej lub kaw lus raug teeb tsa thiab muab tso rau hauv kev siv, kev xa tawm thiab xa tawm cov kav dej yuav tsum tau muab tshem tawm tag nrho nrog cov pa roj uas tau xa tawm. Qhov no tsis yog tsuas yog tshuab tawm cov plua plav uas tau poob rau hauv lub kaw lus thaum lub sijhawm teeb tsa, tab sis kuj tseem ua lub luag haujlwm ziab hauv cov kav dej, tshem tawm ib feem ntawm cov roj uas muaj dej noo absorbed los ntawm cov yeeb nkab phab ntsa thiab txawm tias cov khoom siv yeeb nkab.
4. Pipeline siab kuaj thiab txais
(1) Tom qab lub kaw lus raug teeb tsa, 100% kev tshuaj xyuas hluav taws xob ntawm cov kav dej thauj cov kua dej muaj kuab lom hauv cov kav dej tshwj xeeb yuav tsum tau ua, thiab lawv qhov zoo yuav tsum tsis txhob qis dua Qib II. Lwm cov kav dej yuav tsum raug kuaj xyuas qhov ntsuas hluav taws xob, thiab qhov ntsuas qhov ntsuas ntsuas yuav tsum tsis pub tsawg dua 5%, qhov zoo yuav tsum tsis txhob qis dua qib III.
(2) Tom qab dhau qhov kev tshuaj ntsuam xyuas tsis muaj kev puas tsuaj, yuav tsum tau ua qhov kev ntsuas siab. Txhawm rau kom ntseeg tau tias qhov ziab thiab huv ntawm cov kav dej, yuav tsum tsis txhob ua qhov kev sim siab hydraulic, tab sis yuav tsum siv lub tshuab pneumatic. Kev ntsuam xyuas huab cua yuav tsum tau ua los ntawm kev siv nitrogen los yog compressed cua uas phim cov qib huv ntawm chav huv. Kev ntsuas siab ntawm lub raj xa dej yuav tsum yog 1.15 npaug ntawm qhov tsim siab, thiab qhov ntsuas siab ntawm lub tshuab nqus tsev yuav tsum yog 0.2MPa. Thaum lub sij hawm xeem, lub siab yuav tsum maj mam thiab maj mam nce. Thaum lub siab nce mus txog 50% ntawm qhov kev ntsuas siab, yog tias tsis muaj qhov txawv txav lossis tsis pom, txuas ntxiv mus rau qhov siab ntawm cov kauj ruam los ntawm 10% ntawm qhov kev ntsuas siab, thiab ua kom lub siab ruaj khov rau 3 feeb ntawm txhua qib kom txog thaum lub ntsuas siab. . Stabilize lub siab rau 10 feeb, tom qab ntawd txo qhov siab mus rau qhov tsim siab. Lub sij hawm nres lub siab yuav tsum tau txiav txim siab raws li qhov xav tau ntawm kev kuaj pom. Tus neeg sawv cev foaming yog tsim nyog yog tias tsis muaj qhov xau.
(3) Tom qab lub tshuab nqus tsev xeem dhau qhov kev ntsuas siab, nws yuav tsum tau ua 24-teev lub tshuab nqus tsev ntsuas raws li cov ntaub ntawv tsim, thiab tus nqi siab yuav tsum tsis txhob siab dua 5%.
(4) Kev ntsuam xyuas qhov dej. Rau ppb thiab ppt qib kav dej, raws li cov lus qhia tshwj xeeb, tsis muaj qhov xau yuav tsum raug suav tias yog qhov tsim nyog, tab sis qhov kev ntsuas qhov dej xau yog siv thaum tsim qauv, uas yog, qhov ntsuas qhov xau tau ua tom qab ntsuas huab cua nruj. Lub siab yog lub siab ua haujlwm, thiab lub siab yog nres rau 24 teev. Qhov nruab nrab cov dej ntws tawm ib teev tsawg dua lossis sib npaug li 50ppm raws li tsim nyog. Kev suav ntawm cov dej xau yog raws li hauv qab no:
A = (1-P2T1/P1T2) * 100/T
Hauv cov qauv:
Ib teev xau (%)
P1-Qhov siab siab thaum pib ntawm qhov kev xeem (Pa)
P2-Qhov siab kawg ntawm qhov kev xeem (Pa)
T1-qhov kub thiab txias thaum pib ntawm qhov ntsuas (K)
T2-qhov kub thiab txias thaum kawg ntawm kev xeem (K)
Post lub sij hawm: Dec-12-2023